Flat Panel Station (FPD series)

Features: (FPD1620 )

• Dimension (W / D / H): 1550mm X 1200mm X 2000mm
• Weight : 1500kg (including dark box)
• Chuck theta : +/- 10 degree
• Microscope coarse adjustment 400mm X 500mm
• Microscope fine adjustment 25mm X 25mm
• Microscope Z pneumatic up 60mm
· Chuck size 400mm X 500mm
· Chuck go out 250mm for easy substrate loading
· Platen travel range 600mm X 700mm
• Vibration damper X 4
• Other size on request