Flood Exposurer (FE series)

Features:
• Flood exposure application
• No alignment system
• No imaging system
• Wafer size : 4", 6", 8"
• Lamp power : 350W, 500W, 1 000W
• Spectrum : NUV (300nm~400nm)
• High quality exposure optics
• Wedge Error Compensation (WEC)
• Precise gap setting