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Vacuum Probe Station (VPS series)
Features:
* Probing under high vacuum up to 10-7 mbar
* Different substrate carriers for wafers up to 8” or single dies
* High flexibility, system is customized to user's requirements
* wide range of measurements (I-V, C-V, HF)
* Other test equipment can be implemented (e.g. motion analysis)
* The main application is MEMS/MOEMS
* Probing under high vacuum up to 10-7 mbar
* Different substrate carriers for wafers up to 8” or single dies
* High flexibility, system is customized to user's requirements
* wide range of measurements (I-V, C-V, HF)
* Other test equipment can be implemented (e.g. motion analysis)
* The main application is MEMS/MOEMS
More Details
Options:
1. Anti-vibration Table
2. Adapter – Connect with different instruments
3. Vacuum pump (Turbo, Mechanical)
4. Vacuum gauge
5. Valves
6. Air compressor
7. Others